Electrochemical Microsystem Technologies

Driven by the electronics industry electrochemical technology has rapidly evolved finding increasing applications in microelectronics batteries sensors materials science industrial fabrication corrosion microbiology neurobiology and medicine. Electrochemical Microsystem Technologies provides an overview of the technological status; the development of micropatternings and micro-biosensors; and the applications of micropower with electrochemical microsystems. This book covers a wide spectrum of issues ranging from fundamental electrochemical processes to their applications in micro- and nanofabrication microanalyses microsensing and their interaction with inorganic surfaces and biological systems. The editors provide comprehensive background to unique processes such as the technological development of miniaturization microfabrication thin film deposition etching cleaning planarization and silicon processing technologies to introduce a wide range of applications in context. More than 40 internationally recognized industry research and medical experts provide insight on the current status and future trends in their fields. They also highlight the impact of applying electrochemical microsystem technologies on industries such as storage and packaging; microelectronics sensors and portable electronics; machining polishing anodization and plating technologies in heavy industries; biosensing biological implant technology and neurobiology; and cross-disciplinary integrated systems. Electrochemical Microsystem Technologies is a valuable reference for graduate/postgraduate students technologists and researchers working in the field of electrochemical technology. Language: English